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• Abundant variations → Optimal models can be selected according to the application • Service support available not only in Japan but worldwide
It is a measuring instrument that measures the degree of vacuum (pressure). It can be divided into absolute vacuum gauges and differential vacuum gauges, but here we will handle absolute vacuum gauges.
Pirani vacuum gauge with a wide range of applications, such as for measurement in low to medium vacuum areas and for installation in various systems!
The Pirani gauge "M-350PG" is a versatile Pirani vacuum gauge that combines ease of measurement from atmospheric pressure and high cost performance. It can be used in various industries, including food, automotive, and pharmaceuticals, for measuring in the low to medium vacuum range and for integration into various systems. 【Features】 ■ Good reproducibility and low price ■ Measurement range from 5×10^-2 Pa to atmospheric pressure ■ Suitable for measuring in the low to medium vacuum range *For more details, please refer to the PDF document or feel free to contact us.
A vacuum gauge suitable for various vacuum systems.
The "Capacitance Gauge" is a temperature-compensated diaphragm vacuum gauge that can measure absolute pressure with high precision and stability. It features excellent zero-point stability, low temperature dependence, and outstanding vibration resistance. The "Cold Cathode Pirani Gauge" is a combination gauge that combines a robust cold cathode gauge (cold cathode ionization vacuum gauge) and a Pirani gauge, offering a wide pressure measurement range from atmospheric pressure to high vacuum. For more details, please refer to the PDF document or feel free to contact us.
Easy maintenance with only parts replacement! Contributes to cost reduction and management load reduction of the system with dual functionality.
The M-361CP is a combination gauge that integrates a Pirani gauge for measuring atmospheric pressure to medium vacuum and a cold cathode gauge for measuring high to ultra-high vacuum. It can measure a wide pressure range with a single unit, contributing to cost reduction and reduced management burden for the system by serving dual purposes. Additionally, it features easy maintenance with only parts replacement required. 【Features】 ■ Improved measurement stability - The newly developed discharge assist function reduces switching failures between the Pirani and cold cathode, as well as measurement interruptions due to lack of discharge. ■ Achieves excellent atmospheric pressure detection (compared to our products) - The Pirani gauge equipped in this device has improved stability and reproducibility near atmospheric pressure. *For more details, please refer to the PDF document or feel free to contact us.
Highly reproducible and low-cost, with no restrictions on installation direction! A model compatible with hard process equipment.
The Pirani gauge "M-351PG" uses Ni filament to improve corrosion resistance and is compatible with hard process equipment such as RIE and CVD. It offers good reproducibility at a low price, with no restrictions on installation direction. It can be used in various devices, including semiconductor and electronic device manufacturing equipment, as well as food and pharmaceutical manufacturing equipment. 【Features】 - Improved corrosion resistance (such as the use of Ni filament) - Good reproducibility at a low price - Operating range from 5×10^-2 Pa to atmospheric pressure - No restrictions on installation direction *For more details, please refer to the PDF document or feel free to contact us.
